Formation of the silicon coating on the NiTi substrate by magnetron sputteringi

Bibliographic Details
Parent link:Gas Discharge Plasmas and Their Applications (GDP 2019): 14th International Conference, September 15–21, 2019, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU) ; eds. Yu. D. Korolev, N. N. Koval. [С. 190].— , 2019
Main Author: Luchin A. V.
Corporate Author: National Research Tomsk Polytechnic University
Other Authors: Krukovskii K. V., Kashin O. A.
Summary:Заглавие с титульного экрана
Published: 2019
Subjects:
Online Access:http://earchive.tpu.ru/handle/11683/57739
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=630872