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|a (RuTPU)RU\TPU\conf\21067
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|a RU\TPU\conf\20041
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|a 20170221d2016 k y0engy50 ba
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|a eng
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|a RU
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|a y z 101zy
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|a i
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|a b
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|a High intensity plasma immersion metal ion beam source for surface modification of materials
|f A. I. Ryabchikov [et al.]
|
| 203 |
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|a Текст
|c электронный
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|a 1 computer file (pdf; 267 Kb)
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|a Title screen
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| 463 |
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0 |
|0 (RuTPU)RU\TPU\conf\19513
|t Energy Fluxes and Radiation Effects (EFRE-2016)
|o International Congress, October 2–7, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]
|v [P. 178]
|d 2016
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 610 |
1 |
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|a электронный ресурс
|
| 610 |
1 |
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|a Vacuum arc
|
| 610 |
1 |
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|a Plasma
|
| 610 |
1 |
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|a Ion beams
|
| 610 |
1 |
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|a Repetitively pulsed bias
|
| 610 |
1 |
|
|a вакуумные дуги
|
| 610 |
1 |
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|a плазма
|
| 610 |
1 |
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|a ионные пучки
|
| 610 |
1 |
|
|a поверхности
|
| 610 |
1 |
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|a материалы
|
| 701 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Ananin
|b P. S.
|c physicist
|c senior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences
|f 1942-
|g Petr Semenovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\35673
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| 701 |
|
1 |
|a Dektyarev
|b S. V.
|c physicist
|c design engineer of Tomsk Polytechnic University
|f 1957-
|g Sergey Valentinovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\35672
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| 701 |
|
1 |
|a Shevelev
|b A. E.
|c Physicist
|c Engineer of Tomsk Polytechnic University
|f 1990-
|g Aleksey Eduardovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\36832
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| 701 |
|
1 |
|a Sivin
|b D. O.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Denis Olegovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\34240
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| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Лаборатория № 22
|h 6469
|2 stltpush
|3 (RuTPU)RU\TPU\col\19225
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2 |
|a RU
|b 63413507
|c 20191106
|g RCR
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| 856 |
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|u http://earchive.tpu.ru/handle/11683/37223
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| 942 |
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|c BK
|
