Okhotnikov V. V. Vitaly Vladimirovich, Linnik S. A. Stepan Andreevich, & Gaydaychuk A. V. Alexander Valerievich. (2016). Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016.
Chicago-Zitierstil (17. Ausg.)Okhotnikov V. V. Vitaly Vladimirovich, Linnik S. A. Stepan Andreevich, und Gaydaychuk A. V. Alexander Valerievich. Highly Selective Deposition of CVD Diamond on Si Wafers by Using a Combined Technique of Photolithography and Ion Etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.
MLA-Zitierstil (9. Ausg.)Okhotnikov V. V. Vitaly Vladimirovich, et al. Highly Selective Deposition of CVD Diamond on Si Wafers by Using a Combined Technique of Photolithography and Ion Etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.