Okhotnikov V. V. Vitaly Vladimirovich, Linnik S. A. Stepan Andreevich, & Gaydaychuk A. V. Alexander Valerievich. (2016). Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016.
Цитирование в стиле Чикаго (17-е изд.)Okhotnikov V. V. Vitaly Vladimirovich, Linnik S. A. Stepan Andreevich, и Gaydaychuk A. V. Alexander Valerievich. Highly Selective Deposition of CVD Diamond on Si Wafers by Using a Combined Technique of Photolithography and Ion Etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.
Цитирование MLA (9-е изд.)Okhotnikov V. V. Vitaly Vladimirovich, et al. Highly Selective Deposition of CVD Diamond on Si Wafers by Using a Combined Technique of Photolithography and Ion Etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.