APA (7th ed.) Citation

Okhotnikov V. V. Vitaly Vladimirovich, Linnik S. A. Stepan Andreevich, & Gaydaychuk A. V. Alexander Valerievich. (2016). Highly selective deposition of CVD diamond on si wafers by using a combined technique of photolithography and ion etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016.

Chicago Style (17th ed.) Citation

Okhotnikov V. V. Vitaly Vladimirovich, Linnik S. A. Stepan Andreevich, and Gaydaychuk A. V. Alexander Valerievich. Highly Selective Deposition of CVD Diamond on Si Wafers by Using a Combined Technique of Photolithography and Ion Etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.

MLA (9th ed.) Citation

Okhotnikov V. V. Vitaly Vladimirovich, et al. Highly Selective Deposition of CVD Diamond on Si Wafers by Using a Combined Technique of Photolithography and Ion Etching; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.