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20231101133147.0 |
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|a (RuTPU)RU\TPU\conf\19981
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|a RU\TPU\conf\19980
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|a 621400
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|a 20161219d2016 k y0engy50 ba
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|a eng
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|a RU
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|a y z 101zy
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|a drgn ---uucaa
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|a i
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|a b
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|a Characterzations of nitrogen-doped titanium dioxide films prepared by reactive magnetron sputtering deposition
|f V. F. Pichugin, A. A. Pustovalova
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| 203 |
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|a Текст
|c электронный
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| 230 |
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|a 1 computer file (pdf; 233 Kb)
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|a Title screen
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|0 (RuTPU)RU\TPU\conf\19513
|t Energy Fluxes and Radiation Effects (EFRE-2016)
|o International Congress, October 2–7, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]
|v [P. 321]
|d 2016
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| 610 |
1 |
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|a труды учёных ТПУ
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| 610 |
1 |
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|a электронный ресурс
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| 610 |
1 |
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|a легирование
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| 610 |
1 |
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|a азот
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| 610 |
1 |
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|a пленки
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| 610 |
1 |
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|a диоксид титана
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| 610 |
1 |
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|a осаждение
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| 610 |
1 |
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|a реактивное распыление
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| 610 |
1 |
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|a магнетронное распыление
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| 610 |
1 |
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|a магнетроны
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| 610 |
1 |
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|a magnetron
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| 610 |
1 |
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|a sputtering
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| 610 |
1 |
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|a TiON films
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| 700 |
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1 |
|a Pichugin
|b V. F.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c Physicist
|f 1944-
|g Vladimir Fyodorovich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\30933
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| 701 |
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1 |
|a Pustovalova
|b A. A.
|c biophysicist
|c engineer of Tomsk Polytechnic University
|f 1989-
|g Alla Aleksandrovna
|2 stltpush
|3 (RuTPU)RU\TPU\pers\34214
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| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Кафедра экспериментальной физики (ЭФ)
|h 7596
|2 stltpush
|3 (RuTPU)RU\TPU\col\21255
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| 801 |
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2 |
|a RU
|b 63413507
|c 20161230
|g RCR
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| 856 |
4 |
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|u http://earchive.tpu.ru/handle/11683/35857
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| 942 |
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|c BK
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