Influence of repetitively-pulsed plasma immersion low energy on implantation to tin coating properties formation; Energy Fluxes and Radiation Effects (EFRE-2016)

Influence of repetitively-pulsed plasma immersion low energy on implantation to tin coating properties formation; Energy Fluxes and Radiation Effects (EFRE-2016)

Bibliografiska uppgifter
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2016).— 2016.— [P. 314]
Institutionella upphovsmän:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Центр измерений свойств материалов (ЦИСМ)
Övriga upphovsmän:	Sivin D. O. Denis Olegovich, Ananin P. S. Petr Semenovich, Dektyarev S. V. Sergey Valentinovich, Ryabchikov A. I. Aleksandr Ilyich, Shevelev A. E. Aleksey Eduardovich, Korneva O. S. Olga Sergeevna
Sammanfattning:	Title screen
Språk:	engelska
Publicerad:	2016
Ämnen:	труды учёных ТПУ электронный ресурс энергия имплантация покрытия олово нитрид титана вакуумные дуги смещения titanium nitride coating vacuum arc negative high-frequency short-pulsed bias
Länkar:	http://earchive.tpu.ru/handle/11683/35854
Materialtyp:	Elektronisk Bokavsnitt
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621397

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