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|a (RuTPU)RU\TPU\conf\19978
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| 035 |
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|a RU\TPU\conf\19977
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|a 621397
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| 100 |
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|a 20161219d2016 k||y0rusy50 ba
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| 101 |
0 |
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|a eng
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|a RU
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| 135 |
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|a drgn ---uucaa
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0 |
|a i
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| 182 |
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0 |
|a b
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| 200 |
1 |
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|a Influence of repetitively-pulsed plasma immersion low energy on implantation to tin coating properties formation
|f D. O. Sivin [et al.]
|
| 203 |
|
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|a Текст
|c электронный
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| 300 |
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|a Title screen
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| 463 |
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1 |
|0 (RuTPU)RU\TPU\conf\19513
|t Energy Fluxes and Radiation Effects (EFRE-2016)
|o International Congress, October 2–7, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]
|v [P. 314]
|d 2016
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 610 |
1 |
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|a электронный ресурс
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| 610 |
1 |
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|a энергия
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| 610 |
1 |
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|a имплантация
|
| 610 |
1 |
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|a покрытия
|
| 610 |
1 |
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|a олово
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| 610 |
1 |
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|a нитрид титана
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| 610 |
1 |
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|a вакуумные дуги
|
| 610 |
1 |
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|a смещения
|
| 610 |
1 |
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|a titanium nitride coating
|
| 610 |
1 |
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|a vacuum arc
|
| 610 |
1 |
|
|a negative high-frequency short-pulsed bias
|
| 701 |
|
1 |
|a Sivin
|b D. O.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Denis Olegovich
|3 (RuTPU)RU\TPU\pers\34240
|
| 701 |
|
1 |
|a Ananin
|b P. S.
|c physicist
|c senior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences
|f 1942-
|g Petr Semenovich
|3 (RuTPU)RU\TPU\pers\35673
|
| 701 |
|
1 |
|a Dektyarev
|b S. V.
|c physicist
|c design engineer of Tomsk Polytechnic University
|f 1957-
|g Sergey Valentinovich
|3 (RuTPU)RU\TPU\pers\35672
|
| 701 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Shevelev
|b A. E.
|c Physicist
|c Engineer of Tomsk Polytechnic University
|f 1990-
|g Aleksey Eduardovich
|3 (RuTPU)RU\TPU\pers\36832
|
| 701 |
|
1 |
|a Korneva
|b O. S.
|c physicist
|c engineer of Tomsk Polytechnic University
|f 1988-
|g Olga Sergeevna
|3 (RuTPU)RU\TPU\pers\37178
|9 20156
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Лаборатория № 22
|3 (RuTPU)RU\TPU\col\19225
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Центр измерений свойств материалов (ЦИСМ)
|3 (RuTPU)RU\TPU\col\19361
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20191106
|g RCR
|
| 856 |
4 |
|
|u http://earchive.tpu.ru/handle/11683/35854
|
| 942 |
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|c BK
|
