The energy flux onto substrate during coating deposition using magnetron with liquid metal target

The energy flux onto substrate during coating deposition using magnetron with liquid metal target

书目详细资料
Parent link:	Energy Fluxes and Radiation Effects (EFRE-2016): International Congress, October 2–7, 2016, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]. [P. 234].— , 2016
主要作者:	Bleykher (Bleicher) G. A. Galina Alekseevna
其他作者:	Borduleva A. O. Alena Olegovna, Yuryeva A. V. Alena Victorovna
总结:	Title screen
语言:	英语
出版:	2016
主题:	труды учёных ТПУ электронный ресурс энергия подложки покрытия магнетроны мишени жидкие металлы магнетронное распыление поток энергии жидкие фазы magnetron sputtering evaporation energy flux onto substrate liguid-phase target
在线阅读:	http://earchive.tpu.ru/handle/11683/35833
格式:	电子本书章节
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621310

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