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20240115143502.0 |
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|a (RuTPU)RU\TPU\conf\19877
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|a RU\TPU\conf\19876
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|a 621310
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|a 20161214d2016 k y0engy50 ba
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0 |
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|a eng
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|a RU
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|a y z 101zy
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|a drgn ---uucaa
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| 181 |
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|a i
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| 182 |
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|a b
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| 200 |
1 |
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|a The energy flux onto substrate during coating deposition using magnetron with liquid metal target
|f G. A. Bleykher, A. O. Borduleva, A. V. Yuryeva
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| 203 |
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|a Текст
|c электронный
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| 300 |
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|a Title screen
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|0 (RuTPU)RU\TPU\conf\19513
|t Energy Fluxes and Radiation Effects (EFRE-2016)
|o International Congress, October 2–7, 2016, Tomsk, Russia
|o abstracts
|f National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]
|v [P. 234]
|d 2016
|
| 610 |
1 |
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|a труды учёных ТПУ
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| 610 |
1 |
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|a электронный ресурс
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| 610 |
1 |
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|a энергия
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| 610 |
1 |
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|a подложки
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| 610 |
1 |
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|a покрытия
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| 610 |
1 |
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|a магнетроны
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| 610 |
1 |
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|a мишени
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| 610 |
1 |
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|a жидкие металлы
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| 610 |
1 |
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|a магнетронное распыление
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| 610 |
1 |
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|a поток энергии
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| 610 |
1 |
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|a жидкие фазы
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| 610 |
1 |
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|a magnetron sputtering
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| 610 |
1 |
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|a evaporation
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| 610 |
1 |
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|a energy flux onto substrate
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| 610 |
1 |
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|a liguid-phase target
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| 700 |
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1 |
|a Bleykher (Bleicher)
|b G. A.
|c physicist
|c Professor of Tomsk Polytechnic University, Doctor of Physical and Mathematical Sciences
|f 1961-
|g Galina Alekseevna
|3 (RuTPU)RU\TPU\pers\31496
|9 15657
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| 701 |
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1 |
|a Borduleva
|b A. O.
|c specialist in the field of hydrogen energy
|c engineer of Tomsk Polytechnic University
|f 1992-
|g Alena Olegovna
|3 (RuTPU)RU\TPU\pers\36492
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| 701 |
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1 |
|a Yuryeva
|b A. V.
|c specialist in the field of hydrogen energy and plasma technologies
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1983-
|g Alena Victorovna
|3 (RuTPU)RU\TPU\pers\33389
|9 17084
|
| 712 |
0 |
2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Кафедра экспериментальной физики (ЭФ)
|3 (RuTPU)RU\TPU\col\21255
|
| 801 |
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2 |
|a RU
|b 63413507
|c 20161230
|g RCR
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| 856 |
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|u http://earchive.tpu.ru/handle/11683/35833
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| 942 |
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|c BK
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