Bleykher G. A. Galina Alekseevna, Borduleva A. O. Alena Olegovna, & Yuryeva A. V. Alena Victorovna. (2016). The energy flux onto substrate during coating deposition using magnetron with liquid metal target. 2016.
Chicago Style (17th ed.) CitationBleykher G. A. Galina Alekseevna, Borduleva A. O. Alena Olegovna, and Yuryeva A. V. Alena Victorovna. The Energy Flux onto Substrate During Coating Deposition Using Magnetron with Liquid Metal Target. 2016, 2016.
MLA (9th ed.) CitationBleykher G. A. Galina Alekseevna, et al. The Energy Flux onto Substrate During Coating Deposition Using Magnetron with Liquid Metal Target. 2016, 2016.
Warning: These citations may not always be 100% accurate.