Bleykher G. A. Galina Alekseevna, Borduleva A. O. Alena Olegovna, & Yuryeva A. V. Alena Victorovna. (2016). The energy flux onto substrate during coating deposition using magnetron with liquid metal target; Energy Fluxes and Radiation Effects (EFRE-2016). 2016.
Chicago Style (17th ed.) CitationBleykher G. A. Galina Alekseevna, Borduleva A. O. Alena Olegovna, and Yuryeva A. V. Alena Victorovna. The Energy Flux onto Substrate During Coating Deposition Using Magnetron with Liquid Metal Target; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.
MLA (9th ed.) CitationBleykher G. A. Galina Alekseevna, et al. The Energy Flux onto Substrate During Coating Deposition Using Magnetron with Liquid Metal Target; Energy Fluxes and Radiation Effects (EFRE-2016). 2016, 2016.