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The mathematical model of the initial stage of surface treatment with particle flux

The mathematical model of the initial stage of surface treatment with particle flux

Bibliographic Details
Parent link:Energy Fluxes and Radiation Effects (EFRE-2016): International Congress, October 2–7, 2016, Tomsk, Russia/ National Research Tomsk Polytechnic University (TPU) ; eds. B. M. Kovalchuk [et al.]. [P. 230].— , 2016
Main Author: Parfenova E. S. Elena Sergeevna
Corporate Author: Национальный исследовательский Томский политехнический университет (ТПУ) Институт физики высоких технологий (ИФВТ) Кафедра физики высоких технологий в машиностроении (ФВТМ)
Other Authors: Knyazeva A. G. Anna Georgievna
Summary:Title screen
Published: 2016
Subjects:
труды учёных ТПУ
электронный ресурс
математические модели
поверхности
потоки частиц
ионная имплантация
диффузия
механические напряжения
mathematical model
ion implantation
diffusion
mechanical stress
Online Access:http://earchive.tpu.ru/handle/11683/35832
Format: Electronic Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=621309
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http://earchive.tpu.ru/handle/11683/35832

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