APA (7th ed.) Citation

Lazarev A. V., Andreeva M. A., & Smirnova U. A. Uliana Aleksandrovna. (2015). Magnetron sputtering system. 2015.

Chicago Style (17th ed.) Citation

Lazarev A. V., Andreeva M. A., and Smirnova U. A. Uliana Aleksandrovna. Magnetron Sputtering System. 2015, 2015.

MLA (9th ed.) Citation

Lazarev A. V., et al. Magnetron Sputtering System. 2015, 2015.