Calculation of energy release function of focused ion beam in solids
| Parent link: | Методология проектирования молодежного научно-инновационного пространства как основа подготовки современного инженера.— 2014.— [С. 185-189] |
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| Main Author: | |
| Corporate Authors: | , |
| Other Authors: | , |
| Summary: | Заглавие с экрана The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. Continuous focused ion beam interaction with metals is considered. The power density of deposited energy and specific energy input in a target has been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated. |
| Language: | English |
| Published: |
2014
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| Series: | Integrity of traditions and innovations as the basis for the development of modern engineering science |
| Subjects: | |
| Online Access: | http://earchive.tpu.ru/handle/11683/65007 http://www.lib.tpu.ru/fulltext/c/2014/C07/041.pdf |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=607973 |
| Physical Description: | 1 файл (681 Кб) |
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| Summary: | Заглавие с экрана The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. Continuous focused ion beam interaction with metals is considered. The power density of deposited energy and specific energy input in a target has been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated. |