Calculation of energy release function of focused ion beam in solids; Методология проектирования молодежного научно-инновационного пространства как основа подготовки современного инженера
| Parent link: | Методология проектирования молодежного научно-инновационного пространства как основа подготовки современного инженера.— 2014.— [С. 185-189] |
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| Autor Principal: | |
| Corporate Authors: | , |
| Outros autores: | , |
| Summary: | Заглавие с экрана The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. Continuous focused ion beam interaction with metals is considered. The power density of deposited energy and specific energy input in a target has been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated. |
| Idioma: | inglés |
| Publicado: |
2014
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| Series: | Integrity of traditions and innovations as the basis for the development of modern engineering science |
| Subjects: | |
| Acceso en liña: | http://earchive.tpu.ru/handle/11683/65007 http://www.lib.tpu.ru/fulltext/c/2014/C07/041.pdf |
| Formato: | Electrónico Capítulo de libro |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=607973 |
| Descrición Física: | 1 файл (681 Кб) |
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| Summary: | Заглавие с экрана The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. Continuous focused ion beam interaction with metals is considered. The power density of deposited energy and specific energy input in a target has been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated. |