Структурно-фазовое состояние керамического нанокомпозитного покрытия на основе Si-Al-N
| Parent link: | Перспективы развития фундаментальных наук=Prospects of fundamental sciences development: сборник научных трудов XI Международной конференция студентов и молодых ученых, г. Томск, 22-25 апреля 2014 г./ Национальный исследовательский Томский политехнический университет (ТПУ) ; под ред. Е. А. Вайтулевич. [С. 977-979].— , 2014 |
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| Summary: | Заглавие с экрана Structural-phase state of coatings on the basis of Si-Al N formed by magnetron sputtering was investigated by TEM, SEM and X-ray analysis. It was established that the coatings on the basis of Si-Al-N are polyphase. They have a nanocrystalline structure and there is the aluminum nitride, the silicon nitride α-Si3N4 in their compound. |
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2014
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| Series: | Наноматериалы и нанотехнологии |
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| Online Access: | http://www.lib.tpu.ru/fulltext/c/2014/C21/330.pdf |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=607044 |