Исследование тонких плёнок оксида алюминия на титане; Перспективы развития фундаментальных наук

Bibliografske podrobnosti
Parent link:Перспективы развития фундаментальных наук.— 2013.— [С. 217-219]
Glavni avtor: Чэнь Ле
Korporativna značnica: Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Кафедра общей физики (ОФ)
Drugi avtorji: Ван Ао (научный руководитель), Сыпченко В. С. Владимир Сергеевич, Никитенков Н. Н. Николай Николаевич
Izvleček:Заглавие с экрана
The thin films gained by magnetron sputtering on nanocrystalline specimens of titanium saturated in hydrogen explored by layer-by-layer SIMS and the Thermo-stimulated gas release methods. It is determined: a) as a result of magnetron sputtering are gained the films layer wise nonhomogeneous on chemical composition, b) Titanium can store hydrogen up to what temperature by coating of aluminum oxide, in other words, to determine the temperature at which the destruction of thin films.
Jezik:ruščina
Izdano: 2013
Serija:Физика
Teme:
Online dostop:http://www.lib.tpu.ru/fulltext/c/2013/C21/071.pdf
Format: Elektronski Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=603648
Opis
Fizični opis:1 файл(708 Кб)
Izvleček:Заглавие с экрана
The thin films gained by magnetron sputtering on nanocrystalline specimens of titanium saturated in hydrogen explored by layer-by-layer SIMS and the Thermo-stimulated gas release methods. It is determined: a) as a result of magnetron sputtering are gained the films layer wise nonhomogeneous on chemical composition, b) Titanium can store hydrogen up to what temperature by coating of aluminum oxide, in other words, to determine the temperature at which the destruction of thin films.