Исследование тонких плёнок оксида алюминия на титане; Перспективы развития фундаментальных наук
| Parent link: | Перспективы развития фундаментальных наук.— 2013.— [С. 217-219] |
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| Auteur principal: | |
| Collectivité auteur: | |
| Autres auteurs: | , , |
| Résumé: | Заглавие с экрана The thin films gained by magnetron sputtering on nanocrystalline specimens of titanium saturated in hydrogen explored by layer-by-layer SIMS and the Thermo-stimulated gas release methods. It is determined: a) as a result of magnetron sputtering are gained the films layer wise nonhomogeneous on chemical composition, b) Titanium can store hydrogen up to what temperature by coating of aluminum oxide, in other words, to determine the temperature at which the destruction of thin films. |
| Langue: | russe |
| Publié: |
2013
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| Collection: | Физика |
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| Accès en ligne: | http://www.lib.tpu.ru/fulltext/c/2013/C21/071.pdf |
| Format: | Électronique Chapitre de livre |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=603648 |