Hollow-cathode hot filament arc
| Parent link: | Proceedings of the 17th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV, Berkeley, CA, july 21-26, 1996.— , 1996 Vol. 2.— 1996.— P. 884-886 |
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| Other Authors: | , |
| Summary: | A discharge system with a hot filament mounted inside a cylindrical hollow cathode designed to produce a low-pressure arc discharge is described together with the discharge characteristics. The combination of a hot filament and a hollow cathode allows a decrease in discharge operating voltage and a 3-4-fold increase in discharge current as compared to a configuration containing only a hot filament, without formation of a cathode spot. A discharge in argon with the pressure 1.5?10-1 Pa, the operating voltage 54 V, and the discharge current 90 A, produced plasma whose density in the central region of the working space (0.25 m3) was 1010 cm -3 with the plasma density distribution being uniform within ±20% of the average density. At a reduced pressure (~10-2 Pa), under the conditions of hindered discharge operation, the floating potential in the plasma acquires values 20-30 V below that of the cathode. A plasma generator based on the above type of discharge was used for finishing the material surface before and during the process of plasma-assisted deposition of coatings. В фонде НТБ ТПУ отсутствует |
| Language: | English |
| Published: |
1996
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| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=602549 |