Filtered Vacuum Arc Plasma Application For Ion-Beam and Plasma Material Processing; The 19th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-2015), November 22-27, 2015, The Empress Hotel, Chiang Mai, Thailand

Filtered Vacuum Arc Plasma Application For Ion-Beam and Plasma Material Processing; The 19th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-2015), November 22-27, 2015, The Empress Hotel, Chiang Mai, Thailand

Bibliografske podrobnosti
Parent link:	The 19th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-2015), November 22-27, 2015, The Empress Hotel, Chiang Mai, Thailand.— 2015.— P. 155
Corporate Authors:	Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Лаборатория № 22, Национальный исследовательский Томский политехнический университет (ТПУ) Физико-технический институт (ФТИ) Центр измерений свойств материалов (ЦИСМ)
Drugi avtorji:	Stepanov I. B. Igor Borisovich, Ryabchikov A. I. Aleksandr Ilyich, Shevelev A. E. Aleksey Eduardovich, Ananin P. S. Petr Semenovich, Bumagina A. I. Anna Ivanovna, Sivin D. O. Denis Olegovich, Shulepov I. A. Ivan Anisimovich
Izvleček:	В фонде НТБ ТПУ отсутствует
Jezik:	angleščina
Izdano:	2015
Teme:	труды учёных ТПУ плазменные фильтры вакуумно-дуговая плазма макрочастицы высокочастотные импульсы отрицательное смещение ионная имплантация
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=602527

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