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|a 602527
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|a 20160531d2015 k||y0rusy50 ba
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|a eng
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| 200 |
1 |
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|a Filtered Vacuum Arc Plasma Application For Ion-Beam and Plasma Material Processing
|f I. B. Stepanov [et al.]
|
| 333 |
|
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|a В фонде НТБ ТПУ отсутствует
|
| 463 |
|
1 |
|t The 19th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-2015), November 22-27, 2015, The Empress Hotel, Chiang Mai, Thailand
|o abstracts
|f Plasma and Beam Physics Research Facility (PBP) ; Department of Physics and Materials Science ; Faculty of Science, Chiang Mai University, Thailand
|v P. 155
|d 2015
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 610 |
1 |
|
|a плазменные фильтры
|
| 610 |
1 |
|
|a вакуумно-дуговая плазма
|
| 610 |
1 |
|
|a макрочастицы
|
| 610 |
1 |
|
|a высокочастотные импульсы
|
| 610 |
1 |
|
|a отрицательное смещение
|
| 610 |
1 |
|
|a ионная имплантация
|
| 701 |
|
1 |
|a Stepanov
|b I. B.
|c physicist
|c Head of the laboratory of Tomsk Polytechnic University, Doctor of technical sciences
|f 1968-
|g Igor Borisovich
|3 (RuTPU)RU\TPU\pers\34218
|
| 701 |
|
1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Shevelev
|b A. E.
|c Physicist
|c Engineer of Tomsk Polytechnic University
|g Aleksey Eduardovich
|3 (RuTPU)RU\TPU\pers\36832
|
| 701 |
|
1 |
|a Ananin
|b P. S.
|c physicist
|c senior researcher of Tomsk Polytechnic University, candidate of physical and mathematical sciences
|f 1942-
|g Petr Semenovich
|3 (RuTPU)RU\TPU\pers\35673
|
| 701 |
|
1 |
|a Bumagina
|b A. I.
|c physicist
|c Associate Scientist of Tomsk Polytechnic University
|f 1987-
|g Anna Ivanovna
|3 (RuTPU)RU\TPU\pers\34326
|9 17835
|
| 701 |
|
1 |
|a Sivin
|b D. O.
|c physicist
|c Senior researcher of Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Denis Olegovich
|3 (RuTPU)RU\TPU\pers\34240
|
| 701 |
|
1 |
|a Shulepov
|b I. A.
|c physicist
|c Engineer-designer of Tomsk Polytechnic University, Candidate of physical and mathematical sciences
|f 1954-
|g Ivan Anisimovich
|3 (RuTPU)RU\TPU\pers\33092
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2 |
|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Лаборатория № 22
|3 (RuTPU)RU\TPU\col\19225
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|a Национальный исследовательский Томский политехнический университет (ТПУ)
|b Физико-технический институт (ФТИ)
|b Центр измерений свойств материалов (ЦИСМ)
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