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|a 20130218d2007 k y0rusy50 ca
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|a eng
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|a RU
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1 |
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|a Magnetron system for plasma coating deposition
|f O. Kh. Asainov [et al.]
|
| 333 |
|
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|a В фонде НТБ ТПУ отсутствует
|
| 461 |
|
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|t Известия вузов. Физика
|f Томский государственный университет (ТГУ)
|d 1958-
|
| 463 |
|
|
|t Т. 50, № 9 (Приложение) : 10th International Conference "Gas Discharge Plasmas and Their Applications", 17-20 September 2007, Tomsk
|v P. 95-97
|d 2007
|
| 610 |
1 |
|
|a труды учёных ТПУ
|
| 701 |
|
1 |
|a Asainov
|b O. Kh.
|
| 701 |
|
1 |
|a Bainov
|b D. D.
|c Specialist in the field of plasma technologies
|c Researcher of the Tomsk Polytechnic University, Candidate of technical sciences
|f 1978-
|g Dashi Dambaevich
|3 (RuTPU)RU\TPU\pers\34161
|9 17701
|
| 701 |
|
1 |
|a Krivobokov
|b V. P.
|c Russian physicist
|c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc)
|f 1948-
|g Valery Pavlovich
|3 (RuTPU)RU\TPU\pers\30416
|9 14757
|
| 701 |
|
1 |
|a Mironovich
|b V. V.
|
| 701 |
|
1 |
|a Mikhailov
|b M. N.
|
| 701 |
|
1 |
|a Khalimanovich
|b V. I.
|
| 701 |
|
1 |
|a Harlamov
|b V. A.
|
| 701 |
|
1 |
|a Yudakov
|b S. V.
|c Specialist in the field of automatic control
|c Associate Professor of Tomsk Polytechnic University, Candidate of physico-mathematical sciences
|f 1979-
|g Sergey Vladimirovich
|3 (RuTPU)RU\TPU\pers\33714
|9 17345
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|a RU
|b 63413507
|c 20130218
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|g RCR
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