Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing
| Parent link: | Surface and Coatings Technology.— , 2004- Vol. 201, № 19-20.— 2007.— P. 8596-8600 |
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| Other Authors: | , , , , , , , |
| Summary: | 14th International Conference on Surface Modification of Materials by Ion Beams. (SMMIB 2005) In this paper the latest results obtained for (Ti, Al)N, TiSiB coating deposition using a hybrid technology are presented. This technology includes several approaches. For sample pretreatment the repetitively pulsed high-current ion-beam and high-frequency short-pulsed metal plasma immersion ion surface treatment were used. An intermediate layer between coating and sample surface was formed by metal ion implantation using a high-current vacuum ion-beam and plasma source “Raduga-5”. The vacuum arc microdroplet-filtered metal plasma coating deposition was realized under ion mixing using high-frequency short-pulsed plasma immersion ion technology. It was experimentally shown that for deposition of TiAlN coatings, mono (Ti, Al) and multi-element (TiAl) cathodes can be used. Phase and elemental composition, structural state, and mechanical properties of (Ti,Al)N and TiSiB coatings were observed, and they are presented in this paper. В фонде НТБ ТПУ отсутствует |
| Language: | English |
| Published: |
2007
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| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=597221 |