New broad beam gas ion source for industrial application; Journal of Vacuum Science and Technology A; Vol. 14, № 3
| Parent link: | Journal of Vacuum Science and Technology A Vol. 14, № 3.— 1996.— P. 1050-1055 |
|---|---|
| Other Authors: | Gavrilov N. V., Mesyats G. A. Gennady Andreyevich, Nikulin S. P., Radkovskii G. V., Elkind A., Perry A. J., Treglio J. R. |
| Summary: | В фонде НТБ ТПУ отсутствует |
| Language: | English |
| Published: |
1996
|
| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=596679 |
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