New broad beam gas ion source for industrial application
| Parent link: | Journal of Vacuum Science and Technology A Vol. 14, № 3.— 1996.— P. 1050-1055 |
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| Other Authors: | , , , , , , |
| Summary: | В фонде НТБ ТПУ отсутствует |
| Published: |
1996
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| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=596679 |