New broad beam gas ion source for industrial application; Journal of Vacuum Science and Technology A; Vol. 14, № 3

Bibliographic Details
Parent link:	Journal of Vacuum Science and Technology A Vol. 14, № 3.— 1996.— P. 1050-1055
Other Authors:	Gavrilov N. V., Mesyats G. A. Gennady Andreyevich, Nikulin S. P., Radkovskii G. V., Elkind A., Perry A. J., Treglio J. R.
Summary:	В фонде НТБ ТПУ отсутствует
Language:	English
Published:	1996
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=596679

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