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|a 596679
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|a 20110805d1996 k||y0rusy50 ba
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|a eng
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| 102 |
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|a US
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| 200 |
1 |
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|a New broad beam gas ion source for industrial application
|f N. V. Gavrilov [et al.]
|
| 333 |
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|a В фонде НТБ ТПУ отсутствует
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| 461 |
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|t Journal of Vacuum Science and Technology A
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| 463 |
|
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|t Vol. 14, № 3
|v P. 1050-1055
|d 1996
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 701 |
|
1 |
|a Gavrilov
|b N. V.
|
| 701 |
|
1 |
|a Mesyats
|b G. A.
|c russian physicist
|c academican, vice-president of RAS
|c graduate of Tomsk Polytechnic Institute
|f 1936-
|g Gennady Andreyevich
|3 (RuTPU)RU\TPU\pers\28088
|4 070
|
| 701 |
|
1 |
|a Nikulin
|b S. P.
|
| 701 |
|
1 |
|a Radkovskii
|b G. V.
|
| 701 |
|
1 |
|a Elkind
|b A.
|
| 701 |
|
1 |
|a Perry
|b A. J.
|
| 701 |
|
1 |
|a Treglio
|b J. R.
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| 801 |
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1 |
|a RU
|b 63413507
|c 20110805
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|c CR
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