Gavrilov N. V., Mesyats G. A. Gennady Andreyevich, Nikulin S. P., Radkovskii G. V., Elkind A, Perry A. J., & Treglio J. R. (1996). New broad beam gas ion source for industrial application; Journal of Vacuum Science and Technology A; Vol. 14, № 3. 1996.
Chicago Style (17th ed.) CitationGavrilov N. V., Mesyats G. A. Gennady Andreyevich, Nikulin S. P., Radkovskii G. V., Elkind A, Perry A. J., and Treglio J. R. New Broad Beam Gas Ion Source for Industrial Application; Journal of Vacuum Science and Technology A; Vol. 14, № 3. 1996, 1996.
MLA (9th ed.) CitationGavrilov N. V., et al. New Broad Beam Gas Ion Source for Industrial Application; Journal of Vacuum Science and Technology A; Vol. 14, № 3. 1996, 1996.
Warning: These citations may not always be 100% accurate.