APA (7th ed.) Citation

Gavrilov N. V., Mesyats G. A. Gennady Andreyevich, Nikulin S. P., Radkovskii G. V., Elkind A, Perry A. J., & Treglio J. R. (1996). New broad beam gas ion source for industrial application; Journal of Vacuum Science and Technology A; Vol. 14, № 3. 1996.

Chicago Style (17th ed.) Citation

Gavrilov N. V., Mesyats G. A. Gennady Andreyevich, Nikulin S. P., Radkovskii G. V., Elkind A, Perry A. J., and Treglio J. R. New Broad Beam Gas Ion Source for Industrial Application; Journal of Vacuum Science and Technology A; Vol. 14, № 3. 1996, 1996.

MLA (9th ed.) Citation

Gavrilov N. V., et al. New Broad Beam Gas Ion Source for Industrial Application; Journal of Vacuum Science and Technology A; Vol. 14, № 3. 1996, 1996.