Significance of Self-Sputtering Effect for the Magnetron Discharge

Significance of Self-Sputtering Effect for the Magnetron Discharge

Bibliographic Details
Parent link:	Известия вузов. Физика/ Томский государственный университет (ТГУ).— , 1958-.— 0021-3411 Т. 49, № 8.— 2006.— С. 30-33
Main Author:	Кривобоков В. П. Валерий Павлович
Other Authors:	Жуков В. В., Янин С. Н. Сергей Николаевич
Language:	Russian
Published:	2006
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=536756

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