Significance of Self-Sputtering Effect for the Magnetron Discharge
| Parent link: | Известия вузов. Физика/ Томский государственный университет (ТГУ).— , 1958-.— 0021-3411 Т. 49, № 8.— 2006.— С. 30-33 |
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| Other Authors: | , |
| Language: | Russian |
| Published: |
2006
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| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=536756 |