Feldman M. Martin. (2014). Nanolithography: The art of fabricating nanoelectronic and nanophotonic devices and systems. Oxford, Woodhead Publishing Limited, 2014.
Chicago Style (17th ed.) CitationFeldman M. Martin. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems. Oxford, Woodhead Publishing Limited, 2014, 2014.
MLA (9th ed.) CitationFeldman M. Martin. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems. Oxford, Woodhead Publishing Limited, 2014, 2014.
Warning: These citations may not always be 100% accurate.