APA (7th ed.) Citation

Behrisch R. (1981). Sputtering by particle. Bombardment I: Physical Sputtering of Single-Element Solids. New York, Springer-Verlag, 1981.

Chicago Style (17th ed.) Citation

Behrisch R. Sputtering by Particle. Bombardment I: Physical Sputtering of Single-Element Solids. New York, Springer-Verlag, 1981, 1981.

MLA (9th ed.) Citation

Behrisch R. Sputtering by Particle. Bombardment I: Physical Sputtering of Single-Element Solids. New York, Springer-Verlag, 1981, 1981.