Sputtering by particle. Bombardment I., Physical Sputtering of Single-Element Solids
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| Published: |
New York, Springer-Verlag, 1981
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| Series: | Topics in applied physics Vol. 47 |
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| Format: | Book |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=299232 |