Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage; 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010

Investigation of regularity of plasma formation in large volume on the basis of the hollow cathode effect using high-frequency short-pulsed voltage; 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010

Bibliographic Details
Parent link:10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010.— 2010.— P. 65-66
Other Authors: Ryabchikov A. I. Aleksandr Ilyich, Sivin D. O. Denis Olegovich, Dodorin K.Yu., Ananin P. S. Petr Semenovich, Додорин К. Ю. Константин Юрьевич
Summary:The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm
Language:English
Published: 2010
Subjects:
труды учёных ТПУ
Format: Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239674

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