Bibliographic Details
| Parent link: | 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010: proceedings/ Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov. P. 65-66.— , 2010.— 978-5-94458-112-9 |
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| Other Authors: |
Ryabchikov A. I. Aleksandr Ilyich,
Sivin D. O. Denis Olegovich,
Dodorin K.Yu.,
Ananin P. S. Petr Semenovich,
Додорин К. Ю. Константин Юрьевич |
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| Summary: | The regularities of the nitrogen and argon plasma formation in a hollow cathode with the volume up to 0.2-0.5 m3 using the short-pulsed (1-10 μs) high-frequency (100 kHz) voltage to 3 kV are presented in the paper. It is shown that despite the pulsed nature of voltage, the gaseous discharge steadily burns at the pressure of 0.1 Pa and higher, the discharge current value and plasma concentration grow as the voltage pulse duration and voltage amplitude increase, the general discharge current reaches 10 A, providing the density of the ion saturation current on the items placed in plasma up to 0.5 mA/cm |
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| Published: |
2010
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| Subjects: | |
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| Format: | Book Chapter
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| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239674 |
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