Investigation of characteristics of titanium coatings deposited by powerful lon beams; 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010
| Parent link: | 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010.— 2010.— P. 723-726 |
|---|---|
| Other Authors: | Struts V. K., Matvienko V. M., Petrov A. V., Ryabchikov A. I. Aleksandr Ilyich, Renk T. J. |
| Summary: | Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out |
| Language: | English |
| Published: |
2010
|
| Subjects: | |
| Format: | Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239673 |
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