Investigation of characteristics of titanium coatings deposited by powerful lon beams

Investigation of characteristics of titanium coatings deposited by powerful lon beams

Bibliographic Details
Parent link:	10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010: proceedings/ Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov. P. 723-726.— , 2010.— 978-5-94458-112-9
Other Authors:	Struts V. K., Matvienko V. M., Petrov A. V., Ryabchikov A. I. Aleksandr Ilyich, Renk T. J.
Summary:	Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out
Published:	2010
Subjects:	труды учёных ТПУ
Format:	Book Chapter
KOHA link:	https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239673

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