Bibliographic Details
| Parent link: | 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010: proceedings/ Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov. P. 723-726.— , 2010.— 978-5-94458-112-9 |
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| Other Authors: |
Struts V. K.,
Matvienko V. M.,
Petrov A. V.,
Ryabchikov A. I. Aleksandr Ilyich,
Renk T. J. |
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| Summary: | Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out |
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| Published: |
2010
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| Subjects: | |
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| Format: | Book Chapter
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| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239673 |
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