Investigation of characteristics of titanium coatings deposited by powerful lon beams

Bibliographic Details
Parent link:10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010: proceedings/ Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov. P. 723-726.— , 2010.— 978-5-94458-112-9
Other Authors: Struts V. K., Matvienko V. M., Petrov A. V., Ryabchikov A. I. Aleksandr Ilyich, Renk T. J.
Summary:Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out
Published: 2010
Subjects:
Format: Book Chapter
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239673

MARC

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200 1 |a Investigation of characteristics of titanium coatings deposited by powerful lon beams  |f V. K. Struts [et al.] 
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330 |a Titanium coatings were deposited from the ablation plasma formed under a pulse-high power ion beam impinging on the titanium target. The adhesion of titanium coatings to a silicon substrate,film nanohardness, Young modulus and friction coefficient has been investigated dependingon a distance from a sputtered target to substrate and thickness of deposited coatings. X-raystructural analysis and electron microscopy was carried out 
463 1 |0 (RuTPU)RU\TPU\book\229499  |y 978-5-94458-112-9  |t 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010  |o proceedings  |f Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University ; International Conference on Modification of Materials with Particle Beams and Plasma Flows ; ed. N. Koval and A. I. Ryabchikov  |v P. 723-726  |d 2010  |p 782 p. 
610 1 |a труды учёных ТПУ 
701 1 |a Struts  |b V. K. 
701 1 |a Matvienko  |b V. M. 
701 1 |a Petrov  |b A. V. 
701 1 |a Ryabchikov  |b A. I.  |c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences  |c physicist  |f 1950-  |g Aleksandr Ilyich  |2 stltpush  |3 (RuTPU)RU\TPU\pers\30912 
701 1 |a Renk  |b T. J. 
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