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00000naa2a2200000 4500 |
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239574 |
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20231031205506.0 |
| 035 |
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|a (RuTPU)RU\TPU\book\260795
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| 035 |
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|a RU\TPU\book\246629
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| 090 |
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|a 239574
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| 100 |
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|a 20130610d2010 k y0engy50 ba
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| 101 |
1 |
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|a eng
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| 102 |
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|a RU
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| 200 |
1 |
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|a High-frequency short-pulsed bias source for the ion-plasma material treatment
|f A. I. Ryabchikov, V. I. Tolmachev
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| 320 |
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|a References: p. 68 (3 tit.)
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| 330 |
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|a The high-frequency short-pulsed bias voltage generator for the ion-plasma materialtreatment is described in the paper. The generator provides pulsed negative bias on the load with the frequency of 100 kHz. Pulse duration is adjusted discretely within 1-9 μs, with a step of 1 μs. The output pulse amplitude is adjusted stepwise from 1000 to 5000 V. The maximum current in the load is 10 A. In case of work on a non-conductive sample, a discharge switch removing the charge from the sample is provided
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| 463 |
|
1 |
|0 (RuTPU)RU\TPU\book\229499
|y 978-5-94458-112-9
|t 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010
|o proceedings
|f Tomsk Polytechnic University (TPU) ; Institute of High Current Electronics SB RAS ; High voltage research institute Tomsk Polytechnic University ; Nuclear Physics institute Tomsk Polytechnic University
|v P. 67-68
|d 2010
|p 782 p.
|
| 610 |
1 |
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|a труды учёных ТПУ
|
| 700 |
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1 |
|a Ryabchikov
|b A. I.
|c Professor of Tomsk Polytechnic University, Doctor of physical and mathematical sciences
|c physicist
|f 1950-
|g Aleksandr Ilyich
|2 stltpush
|3 (RuTPU)RU\TPU\pers\30912
|
| 701 |
|
1 |
|a Tolmachev
|b V. I.
|
| 801 |
|
0 |
|a RU
|b 63413507
|c 20011210
|g PSBO
|
| 801 |
|
2 |
|a RU
|b 63413507
|c 20130610
|g PSBO
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| 942 |
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|c BK
|
