Bibliographic Details
| Parent link: | 10th International Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 19-24 September 2010.— 2010.— P. 67-68 |
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| Main Author: |
Ryabchikov A. I. Aleksandr Ilyich |
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| Other Authors: |
Tolmachev V. I. |
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| Summary: | The high-frequency short-pulsed bias voltage generator for the ion-plasma materialtreatment is described in the paper. The generator provides pulsed negative bias on the load with the frequency of 100 kHz. Pulse duration is adjusted discretely within 1-9 μs, with a step of 1 μs. The output pulse amplitude is adjusted stepwise from 1000 to 5000 V. The maximum current in the load is 10 A. In case of work on a non-conductive sample, a discharge switch removing the charge from the sample is provided |
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| Language: | English |
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| Published: |
2010
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| Subjects: | |
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| Format: | Book Chapter
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| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=239574 |
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