Морфология поверхности покрытий на основе оксидов и оксинитридов титана, полученных методом реактивного магнетронного распыления
| Parent link: | Перспективы развития фундаментальных наук=Prospects of fundamental sciences development: сборник научных трудов IX Международной конференция студентов и молодых ученых, г. Томск, 24-27 апреля 2012 г./ Национальный исследовательский Томский политехнический университет (ТПУ). [С. 67-69].— , 2012 |
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| Other Authors: | , , |
| Summary: | Заглавие с экрана This work is dedicated to the researching of biocompatible titanium oxide and titanium oxinitride thin films surface morphology. The films are formed by the method of reactive magnetron sputtering. The patterns of changes in thickness and roughness parameters with the growth of coatings were analyzed and the structure of coatings was investigated. Elemental analysis was carried out, which showed the presence of titanium and oxygen atoms in titanium oxide films and titanium, oxygen and nitrogen in titanium oxynitride films. |
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2012
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| Series: | Физика |
| Subjects: | |
| Online Access: | http://www.lib.tpu.ru/fulltext/c/2012/C21/018.pdf |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=236363 |