Magnetron Discharge in the Diode with a Liquid-Metal Target

Magnetron Discharge in the Diode with a Liquid-Metal Target

Bibliografiset tiedot
Parent link:7 International conference on modification of materials with particle beams and plasma flows: Tomsk, Russia, 25-29 July 2004/ edited by S. Korovin, A. Ryabchikov. [P. 277-280].— , 2004
Muut tekijät: Zhukov V. V., Kosmin D. M., Krivobokov V. P. Valery Pavlovich, Yanin S. N. Sergey Nikolaevich
Yhteenveto:Title from the title-page.
The operation of a high power density magnetron source in standard and self-sputtering modes are discussed. To understand main properties of the magnetron in self-sputtering mode the light emissive spectra was received and investigated for various conditions of magnetron operation. It is shown that the magnetron based on liquid-metal sputtering process has high rate deposition and able to operate under self-sputtering mode (without operating gas).
Режим доступа: из корпоративной сети ТПУ
Text files
Kieli:englanti
Julkaistu: 2004
Sarja:Modification of material properties
Aiheet:
физика
диоды
магнетроны
магнетронные разряды
основные свойства
эмиссионные спектры
жидкие металлы
самораспыление
труды учёных ТПУ
электронный ресурс
Linkit:http://www.lib.tpu.ru/fulltext2/c/2004/C13/043.pdf
Aineistotyyppi: Elektroninen Kirjan osa
KOHA link:https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=232087

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