Magnetron Discharge in the Diode with a Liquid-Metal Target
| Parent link: | 7 International conference on modification of materials with particle beams and plasma flows.— 2004.— [P. 277-280] |
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| Andre forfattere: | , , , |
| Summary: | Title from the title-page. The operation of a high power density magnetron source in standard and self-sputtering modes are discussed. To understand main properties of the magnetron in self-sputtering mode the light emissive spectra was received and investigated for various conditions of magnetron operation. It is shown that the magnetron based on liquid-metal sputtering process has high rate deposition and able to operate under self-sputtering mode (without operating gas). Режим доступа: из корпоративной сети ТПУ Text files |
| Sprog: | engelsk |
| Udgivet: |
2004
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| Serier: | Modification of material properties |
| Fag: | |
| Online adgang: | http://www.lib.tpu.ru/fulltext2/c/2004/C13/043.pdf |
| Format: | Electronisk Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=232087 |