Magnetron Discharge in the Diode with a Liquid-Metal Target; 7 International conference on modification of materials with particle beams and plasma flows
| Parent link: | 7 International conference on modification of materials with particle beams and plasma flows.— 2004.— [P. 277-280] |
|---|---|
| מחברים אחרים: | , , , |
| סיכום: | Title from the title-page. The operation of a high power density magnetron source in standard and self-sputtering modes are discussed. To understand main properties of the magnetron in self-sputtering mode the light emissive spectra was received and investigated for various conditions of magnetron operation. It is shown that the magnetron based on liquid-metal sputtering process has high rate deposition and able to operate under self-sputtering mode (without operating gas). Режим доступа: из корпоративной сети ТПУ Text files |
| שפה: | אנגלית |
| יצא לאור: |
2004
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| סדרה: | Modification of material properties |
| נושאים: | |
| גישה מקוונת: | http://www.lib.tpu.ru/fulltext2/c/2004/C13/043.pdf |
| פורמט: | MixedMaterials אלקטרוני Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=232087 |
MARC
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| 200 | 1 | |a Magnetron Discharge in the Diode with a Liquid-Metal Target |f V. V. Zhukov [et al.] | |
| 203 | |a Text |c electronic | ||
| 225 | 1 | |a Modification of material properties | |
| 300 | |a Title from the title-page. | ||
| 320 | |a [References: p. 280 (7 tit.)] | ||
| 330 | |a The operation of a high power density magnetron source in standard and self-sputtering modes are discussed. To understand main properties of the magnetron in self-sputtering mode the light emissive spectra was received and investigated for various conditions of magnetron operation. It is shown that the magnetron based on liquid-metal sputtering process has high rate deposition and able to operate under self-sputtering mode (without operating gas). | ||
| 333 | |a Режим доступа: из корпоративной сети ТПУ | ||
| 336 | |a Text files | ||
| 337 | |a Adobe Reader | ||
| 463 | 1 | |0 (RuTPU)RU\TPU\book\75459 |t 7 International conference on modification of materials with particle beams and plasma flows |o Tomsk, Russia, 25-29 July 2004 |f edited by S. Korovin, A. Ryabchikov |v [P. 277-280] |d 2004 |p 1 Multimedia CD-ROM | |
| 610 | 1 | |a физика | |
| 610 | 1 | |a диоды | |
| 610 | 1 | |a магнетроны | |
| 610 | 1 | |a магнетронные разряды | |
| 610 | 1 | |a основные свойства | |
| 610 | 1 | |a эмиссионные спектры | |
| 610 | 1 | |a жидкие металлы | |
| 610 | 1 | |a самораспыление | |
| 610 | 1 | |a труды учёных ТПУ | |
| 610 | 1 | |a электронный ресурс | |
| 701 | 1 | |a Zhukov |b V. V. | |
| 701 | 1 | |a Kosmin |b D. M. | |
| 701 | 1 | |a Krivobokov |b V. P. |c Russian physicist |c professor of Tomsk Polytechnic University (TPU), Doctor of Physical and Mathematical Sciences (DSc) |f 1948- |g Valery Pavlovich |3 (RuTPU)RU\TPU\pers\30416 |9 14757 | |
| 701 | 1 | |a Yanin |b S. N. |c physicist |c Professor of Tomsk Polytechnic University, doctor of physical and mathematical Sciences |f 1958- |g Sergey Nikolaevich |3 (RuTPU)RU\TPU\pers\35099 |9 18374 | |
| 801 | 1 | |a RU |b 63413507 |c 20120118 | |
| 801 | 2 | |a RU |b 63413507 |c 20161229 |g RCR | |
| 856 | 4 | |u http://www.lib.tpu.ru/fulltext2/c/2004/C13/043.pdf | |
| 942 | |c CF | ||