Magnetron Discharge in the Diode with a Liquid-Metal Target
| Parent link: | 7 International conference on modification of materials with particle beams and plasma flows: Tomsk, Russia, 25-29 July 2004/ edited by S. Korovin, A. Ryabchikov. [P. 277-280].— , 2004 |
|---|---|
| Other Authors: | , , , |
| Summary: | Title from the title-page. The operation of a high power density magnetron source in standard and self-sputtering modes are discussed. To understand main properties of the magnetron in self-sputtering mode the light emissive spectra was received and investigated for various conditions of magnetron operation. It is shown that the magnetron based on liquid-metal sputtering process has high rate deposition and able to operate under self-sputtering mode (without operating gas). Режим доступа: из корпоративной сети ТПУ Text files |
| Published: |
2004
|
| Series: | Modification of material properties |
| Subjects: | |
| Online Access: | http://www.lib.tpu.ru/fulltext2/c/2004/C13/043.pdf |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=232087 |
| Summary: | Title from the title-page. The operation of a high power density magnetron source in standard and self-sputtering modes are discussed. To understand main properties of the magnetron in self-sputtering mode the light emissive spectra was received and investigated for various conditions of magnetron operation. It is shown that the magnetron based on liquid-metal sputtering process has high rate deposition and able to operate under self-sputtering mode (without operating gas). Режим доступа: из корпоративной сети ТПУ Text files |
|---|