APA (7th ed.) Citation

Gricenko B. P. Boris Petrovich & Bespalov V. V. Viktor Vladimirovich. (2004). A Cathode Unit for High-Dose Implantation of Semiconductor Materials; 7 International conference on modification of materials with particle beams and plasma flows. 2004.

Chicago Style (17th ed.) Citation

Gricenko B. P. Boris Petrovich and Bespalov V. V. Viktor Vladimirovich. A Cathode Unit for High-Dose Implantation of Semiconductor Materials; 7 International Conference on Modification of Materials with Particle Beams and Plasma Flows. 2004, 2004.

MLA (9th ed.) Citation

Gricenko B. P. Boris Petrovich and Bespalov V. V. Viktor Vladimirovich. A Cathode Unit for High-Dose Implantation of Semiconductor Materials; 7 International Conference on Modification of Materials with Particle Beams and Plasma Flows. 2004, 2004.