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|a Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings
|f D. V. Sidelev
|g National Research Tomsk Polytechnic University ; науч. рук. Y. N. Yurjev
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|a Section VIII: Modern Physical Methods in Science, Engineering and Medicine
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|a Заглавие с титульного листа
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|a [Библиогр.: с. 182 (6 назв.)]
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|t Modern technique and technologies MTT' 2012
|o Proceedings of the 18th international scientific and practical conference of students, post-graduates and young scientists
|f Tomsk Polytechnic University (TPU)
|v [С. 181-182]
|d 2012
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|b D. V.
|c physicist
|c Associate Professor of Tomsk Polytechnic University, Candidate of Technical Sciences
|f 1991-
|g Dmitry Vladimirovich
|y Tomsk
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