Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings
| Parent link: | Modern technique and technologies MTT' 2012.— 2012.— [С. 181-182] |
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| Summary: | Заглавие с титульного листа |
| Language: | English |
| Published: |
2012
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| Series: | Section VIII: Modern Physical Methods in Science, Engineering and Medicine |
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| Online Access: | http://www.lib.tpu.ru/fulltext/v/Conferences/2012/C2/ENG/eng_084.pdf |
| Format: | Electronic Book Chapter |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=227964 |