Sidelev D. V. Dmitry Vladimirovich & Yurjev Y. N. (2012). Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings; Modern technique and technologies MTT' 2012. 2012.
Citação do estilo Chicago (17ª ed.)Sidelev D. V. Dmitry Vladimirovich e Yurjev Y. N. Technological Features of the Dual Magnetron Sputtering System for Reactive Deposition of Thin Film Coatings; Modern Technique and Technologies MTT' 2012. 2012, 2012.
Citação MLA (9ª ed.)Sidelev D. V. Dmitry Vladimirovich e Yurjev Y. N. Technological Features of the Dual Magnetron Sputtering System for Reactive Deposition of Thin Film Coatings; Modern Technique and Technologies MTT' 2012. 2012, 2012.
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