Sidelev D. V. Dmitry Vladimirovich & Yurjev Y. N. (2012). Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings; Modern technique and technologies MTT' 2012. 2012.
Chicago Style (17th ed.) CitationSidelev D. V. Dmitry Vladimirovich and Yurjev Y. N. Technological Features of the Dual Magnetron Sputtering System for Reactive Deposition of Thin Film Coatings; Modern Technique and Technologies MTT' 2012. 2012, 2012.
MLA (9th ed.) CitationSidelev D. V. Dmitry Vladimirovich and Yurjev Y. N. Technological Features of the Dual Magnetron Sputtering System for Reactive Deposition of Thin Film Coatings; Modern Technique and Technologies MTT' 2012. 2012, 2012.
Warning: These citations may not always be 100% accurate.