Sidelev D. V. Dmitry Vladimirovich & Yurjev Y. N. (2012). Technological features of the dual magnetron sputtering system for reactive deposition of thin film coatings. 2012.
Chicago-viite (17. p.)Sidelev D. V. Dmitry Vladimirovich ja Yurjev Y. N. Technological Features of the Dual Magnetron Sputtering System for Reactive Deposition of Thin Film Coatings. 2012, 2012.
MLA-viite (9. p.)Sidelev D. V. Dmitry Vladimirovich ja Yurjev Y. N. Technological Features of the Dual Magnetron Sputtering System for Reactive Deposition of Thin Film Coatings. 2012, 2012.
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