An Introduction to Microelectromechanical Systems Engineering
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| 语言: | 英语 |
| 出版: |
Boston, Artech House, 2004
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| 版: | Second Edition |
| 丛编: | MEMS. Microelectromechanical Systems Series |
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| 格式: | 图书 |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=145573 |