An Introduction to Microelectromechanical Systems Engineering
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| Language: | English |
| Published: |
Boston, Artech House, 2004
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| Edition: | Second Edition |
| Series: | MEMS. Microelectromechanical Systems Series |
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| Format: | Book |
| KOHA link: | https://koha.lib.tpu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=145573 |