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|a eng
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| 102 |
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|a US
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| 105 |
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|a a z 001zy
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| 200 |
1 |
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|a An Introduction to Microelectromechanical Systems Engineering
|f N. Maluf, K. Williams
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| 205 |
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|a Second Edition
|
| 210 |
|
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|a Boston
|c Artech House
|d 2004
|
| 215 |
|
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|a 282 p.
|c il.
|
| 225 |
1 |
|
|a MEMS. Microelectromechanical Systems Series
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| 320 |
|
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|a References at the end of chapters.
|
| 320 |
|
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|a Glossary: p. 261-270.
|
| 320 |
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|a Index: p. 273-282.
|
| 610 |
1 |
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|a электромеханика
|
| 610 |
1 |
|
|a электроника
|
| 610 |
1 |
|
|a микроэлектронные схемы
|
| 610 |
1 |
|
|a материалы
|
| 610 |
1 |
|
|a английский язык
|
| 675 |
|
|
|a 621.31
|v 3
|
| 675 |
|
|
|a 621.382
|v 3
|
| 700 |
|
1 |
|a Maluf
|b N.
|g Nadim
|
| 701 |
|
1 |
|a Williams
|b K.
|g Kirt
|
| 801 |
|
1 |
|a RU
|b 63413507
|c 20081020
|g PSBO
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| 801 |
|
2 |
|a RU
|b 63413507
|c 20081022
|g PSBO
|
| 942 |
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|c BK
|
