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    Structure, Mechanical and Optical Properties of Silicon-Rich Al–Si–N Films Prepared by High Power Impulse Magnetron Sputtering

    Structure, Mechanical and Optical Properties of Silicon-Rich Al–Si–N Films Prepared by High Power Impulse Magnetron Sputtering

    Cyhoeddwyd 2019
    Cael y testun llawn
    Electronig Pennod Llyfr

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