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    Осаждение пленок и покрытий разложением металлоорганических соединений

    Published Москва, Наука, 1981
    Book
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    Formation of Ti-Al-Cr-B-N Coatings by Ion-Magnetron Sputtering of Composite Targets

    Published 2017
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    Electronic Book Chapter
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    Thermal stability of a-C:H:SiOx thin films in hydrogen atmosphere

    Published 2019
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    Electronic Book Chapter
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    Influence of oblique angle deposition on Cu-substituted hydroxyapatite nano-roughness and morphology

    Published 2020
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    Electronic Book Chapter